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Composite mobile robots for the semiconductor industry

Composite mobile robots for the semiconductor industry

  • Outer dimensions Length×width×height (mm)

    1200mm×600mm×1400mm

  • Self-Body Weight

    500kg

  • Load Capacity

    200kg

  • Robot Arm load Capacity

    20kg, four products correspond to four types of fixtures

  • Pick and place accuracy

    ±0.5mm

  • Movement directions

    Forward/Backward/Turn/Spin

  • Walking mode

    Differential Drive

  • Navigation mode

    magnetic strip navigation

  • Navigation accuracy

    ±10mm

  • Parking Accuracy

    ±10mm

  • Power Supply Mode

    Lithium Battery

  • Charging method

    Automatic battery replacement at battery replacement stations to reduce the number of vehicles

  • Communication Method

    Wireless communication

  • Maximum Staightline Speed

    42m/min

  • Application industries

    Semiconductor and chip industries

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